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New MEMS micro gyros. - Adventures in Engineering — LiveJournal
The wanderings of a modern ronin.

Ben Cantrick
  Date: 2006-05-02 07:01
  Subject:   New MEMS micro gyros.
  Mood:der uber-nerd

The ADXRS gyros take advantage of the Coriolis effect by using a resonating mass analogous to the person moving out and in on a rotating platform. The mass is micromachined from polysilicon and is tethered to a polysilicon frame so that it can resonate only along one direction. To measure the Coriolis acceleration, the frame containing the resonating mass is tethered to the substrate by springs at 90° relative to the resonating motion. This figure also shows the Coriolis sense fingers that are used to capacitively sense displacement of the frame in response to the force exerted by the mass, as described further on. If the springs have a stiffness, K, then the displacement resulting from the reaction force will be 2ΩvM/K.


(If bare microchips scare you, there's usually someone selling pre-made modules.)

Gee, I wonder what uses someone could find for those...
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Ben Cantrick
  User: mackys
  Date: 2006-05-02 07:34 (UTC)
  Subject:   Dunno.
These chips aren't cheap - probably $100 in quantity one. But $12k? That's got to have been a non-MEMS version. The tuning forks were probably a tenth of an inch long... not a ten-millionth of an inch long.
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  User: nickhalfasleep
  Date: 2006-05-02 14:56 (UTC)
  Subject:   (no subject)
Hello cheap cruise missiles robots!

I for one welcome our new gyro-stabilized overlords!
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May 2015